LASER ANNEALING FOR SOLID-PHASE THIN-FILM REACTIONS

被引：28
|
作者：
LIAU, ZL
TSAUR, BY
MAYER, JW
机构：
来源：
APPLIED PHYSICS LETTERS | 1979年 / 34卷 / 03期
关键词：
D O I：
10.1063/1.90737
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：221 / 223
页数：3
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