ANALYTICAL FORMULAS FOR CALCULATING THE PROFILE PARAMETERS OF IMPLANTED IONS

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作者：

EYMERY, JP

FNIDIKI, A

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REVUE DE PHYSIQUE APPLIQUEE | 1988年 / 23卷 / 05期

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D O I：

10.1051/rphysap:01988002305092500

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O59 [应用物理学];

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页码：925 / 932

页数：8

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