ANALYTICAL FORMULAS FOR CALCULATING THE PROFILE PARAMETERS OF IMPLANTED IONS

被引：0
|
作者：
EYMERY, JP
FNIDIKI, A
机构：
来源：
REVUE DE PHYSIQUE APPLIQUEE | 1988年 / 23卷 / 05期
关键词：
D O I：
10.1051/rphysap:01988002305092500
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：925 / 932
页数：8
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