FABRICATING BIOMEDICAL SENSORS WITH THIN-FILM TECHNOLOGY

被引：12
|
作者：
NEUMAN, MR
BUCK, RP
COSOFRET, VV
LINDNER, E
LIU, CC
机构：
[1] CASE WESTERN RESERVE UNIV,CLEVELAND,OH 44106
[2] UNIV N CAROLINA,DEPT CHEM,CHAPEL HILL,NC 27514
来源：
IEEE ENGINEERING IN MEDICINE AND BIOLOGY MAGAZINE | 1994年 / 13卷 / 03期
关键词：
Capacitance measurement - Cells - Fabrication - Medical applications - Microelectronics - Structure (composition) - Technology - Thick films - Thin films - Tissue;
D O I：
10.1109/51.294013
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
[No abstract available]
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页码：409 / 419
页数：11
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