MICROTOPOGRAPHY OF OXIDE FILMS FORMED ON TANTALUM

被引:15
|
作者
PAWEL, RE
CATHCART, JV
CAMPBELL, JJ
机构
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D O I
10.1149/1.2427578
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:956 / 960
页数:5
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