ORGANOMETALLIC VAPOR-PHASE EPITAXY OF GAAS USING TRIETHYLARSENIC AS ARSENIC SOURCE

被引：23
|
作者：
FUJITA, S
UEMOTO, Y
ARAKI, S
IMAIZUMI, M
TAKEDA, Y
SASAKI, A
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 07期
关键词：
D O I：
10.1143/JJAP.27.1151
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1151 / 1155
页数：5
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