PRECISION PARTS CLEANING USING SUPERCRITICAL FLUIDS

被引：24

作者：

PURTELL, R ^{[1
]}

ROTHMAN, L ^{[1
]}

ELDRIDGE, B ^{[1
]}

CHESS, C ^{[1
]}

机构：

[1] IBM CORP,PHYS SCI,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 04期

关键词：

D O I：

10.1116/1.578481

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Supercritical fluid extraction and chromatography measurements were made on pieces of disk drive actuator components in order to understand how to clean and analyse these parts. Extract analyses were made by Fourier transform infrared (FTIR) and flame ionization detector measurements. Hydrocarbons, silicones, and fluorocarbons were seen on various pieces of different samples using FTIR, time-of-flight static secondary-ion mass spectrometry (TOF-SSIMS), and x-ray photoelectron spectroscopy. In addition TOF-SSIMS detected di-isooctyl phthalate. Silicones and di-isooctyl phthalate could be removed by CO2 extraction.

引用

页码：1696 / 1701

页数：6

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