PRECISION PARTS CLEANING USING SUPERCRITICAL FLUIDS

被引：24

作者：

PURTELL, R ^{[1
]}

ROTHMAN, L ^{[1
]}

ELDRIDGE, B ^{[1
]}

CHESS, C ^{[1
]}

机构：

[1] IBM CORP,PHYS SCI,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 04期

关键词：

D O I：

10.1116/1.578481

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Supercritical fluid extraction and chromatography measurements were made on pieces of disk drive actuator components in order to understand how to clean and analyse these parts. Extract analyses were made by Fourier transform infrared (FTIR) and flame ionization detector measurements. Hydrocarbons, silicones, and fluorocarbons were seen on various pieces of different samples using FTIR, time-of-flight static secondary-ion mass spectrometry (TOF-SSIMS), and x-ray photoelectron spectroscopy. In addition TOF-SSIMS detected di-isooctyl phthalate. Silicones and di-isooctyl phthalate could be removed by CO2 extraction.

引用

页码：1696 / 1701

页数：6

共 50 条

[1] Precision Parts Cleaning Equipment Using Supercritical Carbon Dioxide and Ultrasonic
Hu, D. D.
Ning, Z. K.
Han, B.
Zhang, H.
Gao, G. R.
ADVANCED POLYMER PROCESSING III, 2013, 561 : 407 - +
[2] Cleaning Porous Materials Using Supercritical Fluids
Krzysztoforski, Jan
Henczka, Marek
PRACTICAL ASPECTS OF CHEMICAL ENGINEERING, 2018, : 231 - 242
[3] Precision cleaning equipment for precision parts
HOPKINS TF
1971, 29 (10): : 82 - 83
[4] Precision cleaning and drying fluids
2000, Turret RAI plc, Uxbridge, Engl (24):
[5] The technology behind cleaning with supercritical fluids
Mount, DJ
Rothman, LB
Robey, RJ
SOLID STATE TECHNOLOGY, 2002, 45 (07) : 103 - +
[6] SUPERCRITICAL FLUIDS FOR SINGLE WAFER CLEANING
BOK, E
KELCH, D
SCHUMACHER, KS
SOLID STATE TECHNOLOGY, 1992, 35 (06) : 117 - 120
[7] Mass transfer intensification in the process of membrane cleaning using supercritical fluids
J. Krzysztoforski
P. Jenny
M. Henczka
Theoretical Foundations of Chemical Engineering, 2016, 50 : 907 - 913
[8] Mass transfer intensification in the process of membrane cleaning using supercritical fluids
Krzysztoforski, J.
Jenny, P.
Henczka, M.
THEORETICAL FOUNDATIONS OF CHEMICAL ENGINEERING, 2016, 50 (06) : 907 - 913
[9] SUPERCRITICAL-FLUID FOR CLEANING METAL PARTS
SILVA, LJ
HAZARDOUS WASTE CONSULTANT, 1995, 13 (01) : A25 - A26
[10] Post-treatments of injected polyamides parts using supercritical fluids
Renard, Olivier
Getto, Daniel
Auger, Aurelien
Poncelet, Olivier J. C.
JOURNAL OF SUPERCRITICAL FLUIDS, 2023, 198

← 1 2 3 4 5 →