METHODOLOGY FOR BIPOLAR PROCESS DIAGNOSIS AND ITS APPLICATION TO ADVANCED SELF-ALIGNED BIPOLAR-TRANSISTORS

被引：9
|
作者：
LI, GP
HACKBARTH, E
CHUANG, CT
TANG, DDL
CHEN, TC
机构：
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1987年 / 34卷 / 08期
关键词：
D O I：
10.1109/T-ED.1987.23145
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1736 / 1740
页数：5
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