THERMAL-DECOMPOSITION OF PLASMA-POLYMERIZED ORGANO-SILICON THIN-FILMS

被引：26
|
作者：
WROBEL, AM
KOWALSKI, J
GREBOWICZ, J
KRYSZEWSKI, M
机构：
来源：
JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY | 1982年 / A17卷 / 03期
关键词：
D O I：
10.1080/00222338208056482
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
引用
收藏
页码：433 / 452
页数：20
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