PARTICLE HEATING IN A RADIO-FREQUENCY PLASMA TORCH

被引：117
|
作者：
YOSHIDA, T [1 ]
AKASHI, K [1 ]
机构：
[1] UNIV TOKYO,FAC ENGN,DEPT MET & MAT SCI,BUNKYO KU,TOKYO 113,JAPAN
来源：
JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 06期
关键词：
D O I：
10.1063/1.324036
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2252 / 2260
页数：9
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