PARTICLE HEATING IN A RADIO-FREQUENCY PLASMA TORCH

被引：117

|

作者：

YOSHIDA, T ^{[1
]}

AKASHI, K ^{[1
]}

机构：

[1] UNIV TOKYO,FAC ENGN,DEPT MET & MAT SCI,BUNKYO KU,TOKYO 113,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 06期

关键词：

D O I：

10.1063/1.324036

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2252 / 2260

页数：9

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