X-RAY-LITHOGRAPHY

被引：76
|
作者：
HEUBERGER, A [1 ]
机构：
[1] TECH UNIV BERLIN,D-1000 BERLIN 12,FED REP GER
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期
关键词：
D O I：
10.1116/1.584026
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：107 / 121
页数：15
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