FERROELECTRIC THIN-FILMS FOR ELECTRONIC APPLICATIONS

被引：222
|
作者：
HAERTLING, GH
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1991年 / 9卷 / 03期
关键词：
D O I：
10.1116/1.577424
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This is a review paper on the history of ferroelectric thin films, current practices in their fabrication, characteristics of interest which relate to their use, and the application of these films to memory and electrooptic devices.
引用
收藏
页码：414 / 420
页数：7
相关论文
共 50 条
  • [41] PREPARATION OF FERROELECTRIC THIN-FILMS BY RF MAGNETRON SPUTTERING
    OGAWA, T
    SENDA, A
    KASANAMI, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 : 11 - 14
  • [42] SYNTHESIS OF FERROELECTRIC THIN-FILMS VIA METALLOORGANIC DECOMPOSITION
    HANRAHAN, JR
    SANCHEZ, E
    SANTIAGO, JJ
    BERRY, DH
    JIANG, Q
    THIN SOLID FILMS, 1991, 202 (02) : 235 - 242
  • [43] MICROSTRUCTURAL CHARACTERIZATION OF FERROELECTRIC THIN-FILMS IN TRANSVERSE SECTION
    REANEY, IM
    BARBER, DJ
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1991, 74 (07) : 1635 - 1638
  • [44] FERROELECTRIC THIN-FILMS FOR MONOLITHIC OPTICAL-DEVICES
    FORK, DK
    ARMANILEPLINGARD, F
    KINGSTON, JJ
    INTEGRATED FERROELECTRICS, 1995, 7 (1-4) : 1 - 13
  • [45] FERROELECTRIC PBTIO3 THIN-FILMS AND THEIR APPLICATION
    OKUYAMA, M
    HAMAKAWA, Y
    INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE, 1991, 29 (03) : 391 - 400
  • [46] GROWTH OF FERROELECTRIC TUNGSTEN BRONZE CRYSTALS AND THIN-FILMS
    NEURGAONKAR, RR
    FERROELECTRICS, 1989, 91 : 209 - 209
  • [47] INSTRUMENT FOR MEASURING SWITCHING TRANSITION IN FERROELECTRIC THIN-FILMS
    SUROWIAK, Z
    DEC, J
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (12): : 1719 - 1720
  • [48] HTS FERROELECTRIC THIN-FILMS FOR TUNABLE MICROWAVE COMPONENTS
    MIRANDA, FA
    MUELLER, CH
    CUBBAGE, CD
    BHASIN, KB
    SINGH, RK
    HARKNESS, SD
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1995, 5 (02) : 3191 - 3194
  • [49] THICKNESS DEPENDENCE OF THE DIELECTRIC SUSCEPTIBILITY OF FERROELECTRIC THIN-FILMS
    ZHONG, WL
    QU, BD
    ZHANG, PL
    WANG, YG
    PHYSICAL REVIEW B, 1994, 50 (17): : 12375 - 12380
  • [50] FERROELECTRIC PLZT THIN-FILMS FABRICATED BY RF SPUTTERING
    TANAKA, K
    HIGUMA, Y
    YOKOYAMA, K
    NAKAGAWA, T
    HAMAKAWA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (07) : 1381 - 1382
12345