共 50 条
- [31] Electron interactions with plasma processing gases:: An update for CF4, CHF3, C2F6, and C3F8JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1999, 28 (04) : 967 - 982Christophorou, LGOlthoff, JK
- [32] Mechanistic study of the reaction of CH2F2 with Cl atoms in the absence and presence of CH4 or C2H6: decomposition of CHF2OH and fate of the CHF2O radicalPHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2019, 21 (18) : 9376 - 9383Osterstrom, Freja F.Andersen, Christinada Silva, Gabriel
- [33] Electron and negative ion densities in C2F6 and CHF3 containing inductively coupled dischargesJOURNAL OF APPLIED PHYSICS, 2000, 87 (11) : 7660 - 7666Hebner, GAMiller, PA
- [34] INTERMEDIATES AND THE PRIMARY STAGES OF ETHANES PYROLYSIS - CF3CH2F, CHF2CHF2 AND CF3CH2CLDOKLADY AKADEMII NAUK, 1994, 339 (05) : 616 - 620BURAVTSEV, NNGRIGOREV, ASKOLBANOVSKII, YAOVSYANNIKOV, AA
- [35] Study on modified silicon surface after CHF3/C2F6 reactive ion etchingETRI Journal, 1994, 16 (01) : 45 - 57Park, Hyung-HoKwon, Kwang-HoLee, Sang-HwanKoak, Byung-HwaNahm, SahnLee, Hee-TaeCho, Kyoung-IkKwon, Oh-JoonKang, Young-II
- [36] Partially halogenated hydrocarbons CHFCl-CF3, CF3-CH3, CF3-CHF-CHF2, CF3-CH2-CF3, CHF2-CF2-CH2F, CF3-CH2-CHF2, CF3-O-CHF2: critical temperature, refractive indices, surface tension and estimates of liquid, vapor and criticalFluid Phase Equilib, 1-2 (187-206):NIST, Gaithersburg, United States
- [37] Partially halogenated hydrocarbons CHFCl-CF3, CF3-CH3, CF3-CHF-CHF2, CF3-CH2-CF3, CHF2-CF2-CH2F, CF3-CH2-CHF2, CF3-O-CHF2: Critical temperature, refractive indices, surface tension and estimates of liquid, vapor and critical densitiesFLUID PHASE EQUILIBRIA, 1996, 122 (1-2) : 187 - 206Schmidt, JWCarrilloNava, EMoldover, MR
- [38] FLUOROCARBON SOLUTIONS AT LOW TEMPERATURES .V. LIQUID MIXTURES C2H6+C2F6 C3H8+C2F6 CH4+C3F8 C2H6+C3F8 C3H8+C3F8 N-C4H10+C3F8 I-C4H10+C3F8 C3H8+N-C4F10 N-C6H14+N-C4F10 N-C7H16+N-C4F10 N-C9H20+N-C4F10 AND N-C10H22+N-C4F10JOURNAL OF PHYSICAL CHEMISTRY, 1967, 71 (10): : 3259 - &GILMOUR, JBZWICKER, JOKATZ, JSCOTT, RL
- [39] RATES OF OH RADICAL REACTIONS .5. REACTIONS WITH CH3F, CH2F2, CHF3, CH3CH2F, AND CH3CHF2 AT 297-KJOURNAL OF PHYSICAL CHEMISTRY, 1979, 83 (19): : 2440 - 2443NIP, WSSINGLETON, DLOVEREND, RPARASKEVOPOULOS, G