RECOIL IMPLANTATION OF ANTIMONY INTO SILICON

被引：30
|
作者：
GROB, A
GROB, JJ
MESLI, N
SALLES, D
SIFFERT, P
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS | 1981年 / 182卷 / APR期
关键词：
D O I：
10.1016/0029-554X(81)90674-1
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：85 / 92
页数：8
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