LOW-TEMPERATURE FABRICATION OF HIGH-MOBILITY POLY-SI TFTS FOR LARGE-AREA LCDS

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作者：
SERIKAWA, T
SHIRAI, S
OKAMOTO, A
SUYAMA, S
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PROCEEDINGS OF THE SID | 1989年 / 30卷 / 02期
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TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
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页码：137 / 141
页数：5
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