High-performance low-temperature poly-Si TFTs and circuits

被引:0
|
作者
Asada, Hideki
Sera, Kenji
Okumura, Fujio
机构
来源
NEC Research and Development | 1999年 / 40卷 / 04期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:433 / 436
相关论文
共 50 条
  • [1] High-performance low-temperature poly-Si TFTs and circuits
    Asada, H
    Sera, K
    Okumura, F
    NEC RESEARCH & DEVELOPMENT, 1999, 40 (04): : 433 - 436
  • [2] HIGH-PERFORMANCE LOW-TEMPERATURE POLY-SI N-CHANNEL TFTS FOR LCD
    MIMURA, A
    KONISHI, N
    ONO, K
    OHWADA, J
    HOSOKAWA, Y
    ONO, YA
    SUZUKI, T
    MIYATA, K
    KAWAKAMI, H
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (02) : 351 - 359
  • [3] Printing formation of low-temperature poly-Si TFTs
    Furusawa, M.
    Tanaka, H.
    Kamakura, T.
    Shimoda, T.
    IDW '06: PROCEEDINGS OF THE 13TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2006, : 1655 - +
  • [4] Silicon epitaxial growth on poly-Si film by HWCVD for low-temperature poly-Si TFTs
    Lee, Seung Ryul
    Ahn, Kyung Min
    Ahn, Byung Tae
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007, 154 (09) : H778 - H781
  • [5] High-quality low-temperature gate oxide for poly-Si TFTs
    Okumura, F
    Yuda, K
    PROCEEDINGS OF THE FOURTH SYMPOSIUM ON THIN FILM TRANSISTOR TECHNOLOGIES, 1999, 98 (22): : 133 - 142
  • [6] High-performance low-temperature poly-Si TFTs crystallized by excimer laser irradiation with recessed-channel structure
    Lin, CW
    Cheng, LJ
    Lu, YL
    Lee, YS
    Cheng, HC
    IEEE ELECTRON DEVICE LETTERS, 2001, 22 (06) : 269 - 271
  • [7] Circuits of system-on-glass (SOG) using low-temperature poly-Si (LTPS) TFTs
    Kim, Seung Soo
    Lee, Hyoung Kyun
    Phon, Chang Soo
    Kim, Chen Hong
    Jun, Jung Mok
    Ryu, Myung Kwan
    Kim, Eok Su
    Park, Jung Ho
    Son, Gon
    Lee, Jung Yeal
    AD'07: PROCEEDINGS OF ASIA DISPLAY 2007, VOLS 1 AND 2, 2007, : 562 - 563
  • [8] Low temperature high k dielectric on poly-Si TFTs
    Pereira, L.
    Barquinha, P.
    Fortunato, E.
    Martins, R.
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2008, 354 (19-25) : 2534 - 2537
  • [9] Characteristics of low-temperature poly-Si TFTs on Al/glass substrates
    Mishima, Y
    Yoshino, K
    Takei, M
    Sasaki, N
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2001, 48 (06) : 1087 - 1091
  • [10] HIGH-PERFORMANCE POLY-SI TFTS FABRICATED USING PULSED-LASER ANNEALING AND REMOTE PLASMA CVD WITH LOW-TEMPERATURE PROCESSING
    KOHNO, A
    SAMESHIMA, T
    SANO, N
    SEKIYA, M
    HARA, M
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1995, 42 (02) : 251 - 257