ELECTRICAL CHARACTERISTICS OF ION-IMPLANTED P-CHANNEL MOS-TRANSISTORS

被引:11
|
作者
NAKAMURA, K [1 ]
KAMOSHIDA, M [1 ]
机构
[1] NIPPON ELECT CO LTD, IC DIV, 1753 SHIMONUMABE, KAWASAKI 211, JAPAN
关键词
D O I
10.1063/1.1662981
中图分类号
O59 [应用物理学];
学科分类号
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引用
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页码:334 / 340
页数:7
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