SURFACE PHOTOPROCESSES IN LASER-ASSISTED ETCHING AND FILM GROWTH

被引：4
|
作者：
HOULE, FA
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 05期
关键词：
D O I：
10.1116/1.584565
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：1149 / 1154
页数：6
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