LASER-ASSISTED CHEMICAL ETCHING OF COPPER

被引：24
|
作者：
RITSKO, JJ
HO, F
HURST, J
机构：
来源：
APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 01期
关键词：
D O I：
10.1063/1.100128
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：78 / 80
页数：3
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