ELECTRON-BEAM BROADENING EFFECTS CAUSED BY DISCRETENESS OF SPACE-CHARGE

被引：63

|

作者：

GROVES, T

HAMMOND, DL

KUO, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570272

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1680 / 1685

页数：6

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