共 50 条
- [21] Fracture resistance enhancement of diamond-like carbon/nitrogenated diamond-like carbon multilayer deposited by electron cyclotron resonance microwave plasma chemical vapor deposition JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2001, 19 (01): : 130 - 135
- [29] Annealing of hydrogenated diamond-like carbon films deposited on ground electrode of plasma enhanced chemical vapor deposition system JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (9A): : 5901 - 5907
- [30] Annealing of hydrogenated diamond-like carbon films deposited on ground electrode of plasma enhanced chemical vapor deposition system Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2007, 46 (9 A): : 5901 - 5907