HIGH-TEMPERATURE ION-IMPLANTATION IN DIAMOND

被引:18
|
作者
LEE, YH
BROSIOUS, PR
CORBETT, JW
机构
[1] SUNY ALBANY,DEPT PHYS,ALBANY,NY 12222
[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
关键词
D O I
10.1002/pssa.2210500127
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:237 / 242
页数:6
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