PHASE CORRECTION IN INTERFEROMETRIC MEASUREMENT OF END STANDARDS

被引:24
|
作者
THWAITE, EG
机构
关键词
D O I
10.1088/0026-1394/14/2/002
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:53 / 62
页数:10
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