X-RAY-SCATTERING TOPOGRAPHY OF METALLIC MULTILAYER FILMS

被引:0
|
作者
SHINOZAKI, T
HONDOH, T
GOTO, A
TAKAHASHI, A
TAKAMA, T
YAMAGUCHI, A
YAMAMOTO, R
机构
[1] HOKKAIDO UNIV,INST LOW TEMP SCI,N19W8,SAPPORO,HOKKAIDO 060,JAPAN
[2] HOKKAIDO UNIV,DEPT APPL PHYS,SAPPORO,HOKKAIDO 060,JAPAN
[3] UNIV TOKYO,INST IND SCI,TOKYO 106,JAPAN
关键词
D O I
10.1016/0304-8853(93)90538-D
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
X-ray scattering topography has been applied to sputtered Co/Au multilayer films in order to clarify structural inhomogeneities along the film surface. The observed difference in the main peak intensities was larger than 20%, but with almost constant integrated intensities. A model for the film structures is discussed in terms of the distribution of crystal sizes and orientations.
引用
收藏
页码:34 / 37
页数:4
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