OPTICAL AND RAMAN CORRELATION OF LASER RECRYSTALLIZED AND QUENCHED AMORPHOUS-SILICON FILM - A MICROPROBE STUDY

被引:2
|
作者
HUANG, CR
LEE, MC
CHANG, YS
LIN, CC
CHAO, YF
机构
[1] NATL CHIAO TUNG UNIV,INST ELECTROOPT ENGN,HSINCHU 30049,TAIWAN
[2] NATL CHIAO TUNG UNIV,DEPT ELECTROPHYS,HSINCHU 30049,TAIWAN
[3] IND TECHNOL RES INST,ELECTR RES & SERV ORG,DISPLAY TECHNOL GRP,HSINCHU 31015,TAIWAN
关键词
D O I
10.1088/0022-3727/23/6/016
中图分类号
O59 [应用物理学];
学科分类号
摘要
The amorphous silicon film, excited by a picosecond laser, has been investigated by a laser microprobe. The optical properties are measured simultaneously with its Raman spectrum. The sharp Raman peak of this properly annealed film is similar to that of crystalline silicon (c-Si) with a significant drop in reflection. A second pulse of proper fluence can reduce the Raman intensity and increase the transmission greatly and this is ascribed to explosive crystallisation and laser quenching. This reamorphisation phenomenon of the annealed film suggests a feasible method for erasable optical recording. © 1990 IOP Publishing Ltd.
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页码:729 / 734
页数:6
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