POCL3 AND BORON GETTERING OF SILICON DEVICES - SIMILARITIES AND DIFFERENCES

被引：0
|
作者：
PAZ, O [1 ]
HEARN, EW [1 ]
FAYO, EM [1 ]
机构：
[1] IBM CORP,DIV SYST PROD,E FISHKILL FACIL,HOPEWELL JUNCTION,NY 12533
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1977年 / 124卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：C308 / C308
页数：1
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