PHOSPHINOCHALCOGENOIC AMIDATO COMPLEXES OF ZINC AND CADMIUM AS NOVEL SINGLE-SOURCE PRECURSORS FOR THE DEPOSITION OF METAL SELENIDE AND TELLURIDE FILMS

被引：24
|
作者：
BWEMBYA, GC
SONG, XJ
BOCHMANN, M
机构：
[1] School of Chemical Sciences, University of East Anglia, Norwich
来源：
CHEMICAL VAPOR DEPOSITION | 1995年 / 1卷 / 03期
关键词：
D O I：
10.1002/cvde.19950010304
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Communication: Potential single-source precursors for metal chalcogenide semiconductor films, such as zinc and cadmium selenides and tellurides, have in the past proved to be difficult to synthesize, thermally unstable, or insufficiently volatile. The title compounds are found to yield high purity metal selenide and telluride films without the incorporation of nitrogen or the formation of nitrogen-containing phases.
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页码：78 / &
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