DEVELOPMENT OF MECHANICAL PROPERTY TESTER FOR THIN-FILMS

被引：0
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作者：
TSUKAMOTO, Y
YAMAGUCHI, H
YANAGISAWA, M
机构：
来源：
NEC RESEARCH & DEVELOPMENT | 1989年 / 95期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：53 / 61
页数：9
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