DEVELOPMENT OF MECHANICAL PROPERTY TESTER FOR THIN-FILMS

被引：0

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作者：

TSUKAMOTO, Y

YAMAGUCHI, H

YANAGISAWA, M

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来源：

NEC RESEARCH & DEVELOPMENT | 1989年 / 95期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：53 / 61

页数：9

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