LOCALIZED THERMAL OXIDATION OF SPUTTERED TANTALUM THIN FILMS ON SILICON

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作者：
CROSET, M
VELASCO, G
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1971年 / 118卷 / 08期
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中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
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页码：C221 / &
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