DIAGNOSTICS BY OPTICAL-EMISSION SPECTROSCOPY IN THE VICINITY OF THE SUBSTRATE DURING MAGNETRON SPUTTERING OF TI

被引：10
|
作者：
PECH, T
CHABRERIE, JP
RICARD, A
机构：
[1] UNIV PARIS 11,CNRS,UNITE 73,PHYS GAZ & PLASMAS LAB,F-91405 ORSAY,FRANCE
[2] ECOLE SUPER ELECT,GRECO CONTACTS ELECT 40,F-91190 GIF SUR YVETTE,FRANCE
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 05期
关键词：
D O I：
10.1116/1.575463
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2987 / 2991
页数：5
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