USE OF LASER-BEAMS FOR MEASURING THE SUBSTRATE-TEMPERATURE IN VACUUM EVAPORATION PROCESSES

被引：5

|

作者：

SHEN, YH

HUA, CY

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1979年 / 167卷 / 01期

关键词：

D O I：

10.1016/0029-554X(79)90494-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：139 / 143

页数：5

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