USE OF LASER-BEAMS FOR MEASURING THE SUBSTRATE-TEMPERATURE IN VACUUM EVAPORATION PROCESSES

被引：5
|
作者：
SHEN, YH
HUA, CY
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS | 1979年 / 167卷 / 01期
关键词：
D O I：
10.1016/0029-554X(79)90494-4
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：139 / 143
页数：5
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