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- [2] VAPOR-PHASE DEPOSITION OF THIN-FILMS OF SILICON AND SILICA FOR MICROELECTRONICS ANNALES DE CHIMIE FRANCE, 1975, 10 (4-5): : 259 - 266
- [3] METHOD FOR PRODUCTION OF UNIFORM THIN-FILMS FROM THE VAPOR-PHASE AUSTRALIAN JOURNAL OF PHYSICS, 1993, 46 (01): : 121 - 126
- [9] Reactions in vapor-phase electrolytic deposition for preparing yttria-stabilized zirconia thin films 1600, American Ceramic Soc, Westerville, OH, United States (83):