A1 REDISTRIBUTION IN THERMALLY OXIDIZED SI SURFACE

被引：6
|
作者：
EDAGAWA, H
MORITA, Y
INUISHI, Y
机构：
来源：
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN | 1963年 / 18卷 / 03期
关键词：
D O I：
10.1143/JPSJ.18.460
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
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页码：460 / &
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