DESIGN AND 3-DIMENSIONAL CALIBRATION OF A MEASURING SCANNING TUNNELING MICROSCOPE FOR METROLOGICAL APPLICATIONS

被引：35
|
作者：
JUSKO, O
ZHAO, X
WOLFF, H
WILKENING, G
机构：
[1] Physikalisch-Technische Bundesanstalt, 38116 Braunschweig
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 08期
关键词：
D O I：
10.1063/1.1144643
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A scanning-tunneling microscope (STM) of the scanning-sample type with transducers for the measurement of the position in all three axes has been developed. Motions in the X-, Y-, and Z-axis are straight and rectangular to a high degree and the capacitance transducers are calibrated in situ by plane mirror laser-interferometry. With these qualities as part of the design, the Abbe error may be minimized. X-Y-capacitance transducers and X-Y-piezo actuators are part of analog servo loops, thus providing positioning in the X-Y-plane to a desired coordinate. The STM is mainly built from commercially available parts.
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页码：2514 / 2518
页数：5
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