DEEP X-RAY-LITHOGRAPHY FOR MICROMECHANICS VIA SYNCHROTRON-RADIATION

被引：4
|
作者：
GUCKEL, H
机构：
[1] Department of Electrical and Computer Engineering, University of Wisconsin, Madison
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 79卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(93)95336-4
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Micromechanics is an emerging field with many applications in microsensors and microactuators. The processing too which is needed for these devices must produce three-dimensional structures from many materials with submicron tolerances. Synchrotron based X-ray lithography can be used to fabricate photoresist molds with structural heights to 500 mum and nearly perfect edge acuity. The plastic molds can be converted to metal molds via electroplating. Fabricated metal parts can be assembled to form complex structures. An example of this technique is a fully functional planar, magnetic micromotor which has been fabricated and is in the testing phase.
引用
收藏
页码：247 / 248
页数：2
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