CARBON FIBER ETCHING IN AN OXYGEN PLASMA

被引:24
|
作者
BARNET, FR [1 ]
NORR, MK [1 ]
机构
[1] USN,ORD LAB,SILVER SPRING,MD 20910
关键词
D O I
10.1016/0008-6223(73)90068-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:281 / &
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