DEVELOPMENT OF MEVVA ION-SOURCE

被引：0
|
作者：
SUN, BH
HU, SB
CHEN, Q
SHUI, YQ
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 04期
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D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Research results of the metal vapor vacuum arc (MEVVA) ion source are reported in this paper. As cathode materials, for example, Al, Ti, Fe, and Cu are used, respectively. A triggering pulse with a pulse height of 12 kV, pulse length of 90 mus, and repetition rate of 1-5 pulses/s is applied between the trigger electrode and the cathode. The pulse duration of the extracted ion beam is 800 mus. When the extraction voltage is 28 kV, the extracted beam current intensity for Al, Ti, Fe, and Cu is 255, 290, 240, and 300 mA, respectively.
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页码：1266 / 1268
页数：3
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