DEVELOPMENT OF MEVVA ION-SOURCE

被引:0
|
作者
SUN, BH
HU, SB
CHEN, Q
SHUI, YQ
机构
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 04期
关键词
D O I
暂无
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Research results of the metal vapor vacuum arc (MEVVA) ion source are reported in this paper. As cathode materials, for example, Al, Ti, Fe, and Cu are used, respectively. A triggering pulse with a pulse height of 12 kV, pulse length of 90 mus, and repetition rate of 1-5 pulses/s is applied between the trigger electrode and the cathode. The pulse duration of the extracted ion beam is 800 mus. When the extraction voltage is 28 kV, the extracted beam current intensity for Al, Ti, Fe, and Cu is 255, 290, 240, and 300 mA, respectively.
引用
收藏
页码:1266 / 1268
页数:3
相关论文
共 50 条
  • [1] DEVELOPMENT AND EXPERIMENTS OF A MEVVA ION-SOURCE
    GAO, Y
    YU, YJ
    TANG, DL
    HUANG, YM
    GENG, M
    GONG, XR
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04): : 1281 - 1284
  • [2] DEVELOPMENT OF A DC, BROAD BEAM, MEVVA ION-SOURCE
    BROWN, IG
    DICKINSON, MR
    GALVIN, JE
    MACGILL, RA
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (04): : 2417 - 2419
  • [3] MEVVA ION-SOURCE FOR THE ITEP SYNCHROTRON
    KATZ, MM
    KONDRATIEV, LN
    POMELOV, NN
    ROGAL, AD
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (10): : 3101 - 3103
  • [4] MEASUREMENT OF SOME PARAMETER ON MEVVA ION-SOURCE
    ZHOU, FS
    WU, XY
    ZHOU, F
    ZHANG, HX
    ZHANG, XJ
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04): : 1263 - 1265
  • [5] METALLIC ION-IMPLANTATION BY USING A MEVVA ION-SOURCE
    JI, CZ
    ZHANG, TH
    ZHANG, HX
    XIE, JD
    WANG, AM
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1994, 129 (3-4): : 161 - 172
  • [6] MEVVA ION-SOURCE FOR THE APPLICATION OF MATERIAL SURFACE MODIFICATION
    ZHANG, HX
    ZHANG, XJ
    ZHOU, FS
    LI, Q
    LIU, FH
    HAN, ZE
    LIN, WL
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04): : 1295 - 1297
  • [7] INVESTIGATION OF MEVVA ION-SOURCE FOR METAL-ION INJECTION INTO ACCELERATORS AT GSI
    WOLF, BH
    EMIG, H
    RUCK, D
    SPADTKE, P
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (10): : 3091 - 3098
  • [8] ION-BEAM NOISE-REDUCTION METHOD FOR THE MEVVA ION-SOURCE
    OKS, E
    SPADTKE, P
    EMIG, H
    WOLF, BH
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (10): : 3109 - 3112
  • [9] THE MEVVA ION-SOURCE FOR HIGH-CURRENT METAL-ION IMPLANTATION
    BROWN, I
    WASHBURN, J
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 201 - 204
  • [10] THE METAL VAPOR VACUUM-ARC (MEVVA) HIGH-CURRENT ION-SOURCE
    BROWN, IG
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1985, 32 (05) : 1723 - 1727