Photoreflectance characterisation of GaAs and GaAs/GaAlAs structures grown by MOCVD

被引:32
|
作者
Misiewicz, J [1 ]
Jezierski, K [1 ]
Sitarek, P [1 ]
Markiewicz, P [1 ]
Korbutowicz, R [1 ]
Panek, M [1 ]
Sciana, B [1 ]
Tlaczala, M [1 ]
机构
[1] WROCLAW TECH UNIV,INST ELECTRON TECHNOL,PL-50372 WROCLAW,POLAND
来源
关键词
photoreflectance spectroscopy; MOCVD; GaAs; GaAlAs; heterostructures; quantum wells; surface; interface; Kramers-Kronig analysis;
D O I
10.1002/amo.860050605
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
Epitaxial undoped and doped (Si and tn) GaAs and GaAlAs layers as well as heterostructures Of GaAs/GaAlAs have been grown in an atmospheric pressure, vertical MOCVD system. Room temperature photoreflectance (PR) has been applied to characterise the layers and heterostructures as well as multiple quantum wells, The surface- and interface-related PR has been studied by application of Kramers-Kronig analysis, A decomposition of the PR spectrum into spectra connected with the surface region and with the interface has been proposed.
引用
收藏
页码:321 / 327
页数:7
相关论文
共 50 条
  • [41] A study of GaAs: Si/GaAs: C tunnel diodes grown by MOCVD
    Vinokurov, D. A.
    Ladugin, M. A.
    Marmalyuk, A. A.
    Padalitsa, A. A.
    Pikhtin, N. A.
    Simakov, V. A.
    Sukharev, A. V.
    Fetisova, N. V.
    Shamakhov, V. V.
    Tarasov, I. S.
    SEMICONDUCTORS, 2009, 43 (09) : 1213 - 1216
  • [42] A study of GaAs: Si/GaAs: C tunnel diodes grown by MOCVD
    D. A. Vinokurov
    M. A. Ladugin
    A. A. Marmalyuk
    A. A. Padalitsa
    N. A. Pikhtin
    V. A. Simakov
    A. V. Sukharev
    N. V. Fetisova
    V. V. Shamakhov
    I. S. Tarasov
    Semiconductors, 2009, 43 : 1213 - 1216
  • [43] Photoreflectance of GaAs structures with a Mn δ-doped layer
    Komkov, O. S.
    Dokichev, R. V.
    Kudrin, A. V.
    Danilov, Yu. A.
    TECHNICAL PHYSICS LETTERS, 2013, 39 (11) : 1008 - 1011
  • [44] Piezoelectric field measurements by photoreflectance in strained InGaAs/GaAs structures grown on polar substrates
    Berger, PD
    Bru, C
    Baltagi, Y
    Benyattou, T
    Berenguer, M
    Guillot, G
    Marcadet, X
    Nagle, J
    MICROELECTRONICS JOURNAL, 1995, 26 (08) : 827 - 833
  • [45] Photoreflectance of low-temperature-grown GaAs on Si-delta-doped GaAs
    Lee, WC
    Hsu, TM
    Chyi, JI
    APPLIED SURFACE SCIENCE, 1997, 113 : 515 - 518
  • [46] Photoreflectance Spectroscopy Study of LT-GaAs Layers Grown on Si and GaAs Substrates
    Avakyants, L. P.
    Bokov, P. Yu.
    Kazakov, I. P.
    Bazalevsky, M. A.
    Deev, P. M.
    Chervyakov, A. V.
    SEMICONDUCTORS, 2018, 52 (07) : 849 - 852
  • [47] HOT PHONONS AND INSTABILITIES IN GAAS/GAALAS STRUCTURES
    BALKAN, N
    GUPTA, R
    RIDLEY, BK
    EMENY, M
    ROBERTS, J
    GOODRIDGE, I
    SOLID-STATE ELECTRONICS, 1989, 32 (12) : 1641 - 1646
  • [48] DEFECT CHARACTERIZATION OF GAAS ON SI GROWN BY MOCVD
    SOGA, T
    NOZAKI, S
    NOTO, N
    NISHIKAWA, H
    JIMBO, T
    UMENO, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (12): : 2441 - 2445
  • [49] Photoreflectance Spectroscopy Study of LT-GaAs Layers Grown on Si and GaAs Substrates
    L. P. Avakyants
    P. Yu. Bokov
    I. P. Kazakov
    M. A. Bazalevsky
    P. M. Deev
    A. V. Chervyakov
    Semiconductors, 2018, 52 : 849 - 852
  • [50] Highly strained quantum structures grown on GaAs(001) vicinal substrate by MOCVD
    Wang, BZ
    Chua, SJ
    Dong, JR
    Wang, YJ
    JOURNAL OF CRYSTAL GROWTH, 2006, 288 (01) : 61 - 64