DIELECTRIC-PROPERTIES OF REACTIVELY SPUTTERED GALLIUM NITRIDE FILMS

被引：13
|
作者：
LAKSHMI, E
机构：
来源：
THIN SOLID FILMS | 1981年 / 83卷 / 01期
关键词：
D O I：
10.1016/0040-6090(81)90597-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：L137 / L139
页数：3
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