LOW-RADIATION-DAMAGE MULTILAYER COATINGS FOR THE SOFT-X-RAY REGION

被引：3
|
作者：
HUNTER, WR [1 ]
SEELY, JF [1 ]
机构：
[1] USN, RES LAB, WASHINGTON, DC 20375 USA
来源：
APPLIED OPTICS | 1993年 / 32卷 / 25期
关键词：
D O I：
10.1364/AO.32.004846
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Highly reflecting multilayer coatings used to form resonant cavities for soft-x-ray lasers or for other high-intensity applications (free-electron lasers, x-ray projection lithography, etc.) can be destroyed by strong electric fields generated at the multilayer boundaries. Electric-field strengths can be reduced at the boundaries by altering slightly the layer thicknesses of the final or topmost layers. Calculations are presented showing reduced field strengths caused by altering final-layer thicknesses.
引用
收藏
页码：4846 / 4851
页数：6
相关论文
共 50 条
  • [41] RESEARCH WITH SYNCHROTRON RADIATION IN THE VACUUM ULTRAVIOLET AND SOFT-X-RAY REGION AT BESSY
    BRAUN, W
    KOCH, EE
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1987, 261 (1-2): : 115 - 125
  • [42] MULTILAYER MIRROR TECHNOLOGY FOR SOFT-X-RAY PROJECTION LITHOGRAPHY
    STEARNS, DG
    ROSEN, RS
    VERNON, SP
    APPLIED OPTICS, 1993, 32 (34): : 6952 - 6960
  • [43] MO/SI MULTILAYER-COATED RULED BLAZED GRATINGS FOR THE SOFT-X-RAY REGION
    KLEINEBERG, U
    OSTERRIED, K
    STOCK, HJ
    MENKE, D
    SCHMIEDESKAMP, B
    FUCH, D
    MULLER, P
    SCHOLZE, F
    HEIDEMANN, KF
    NELLES, B
    HEINZMANN, U
    APPLIED OPTICS, 1995, 34 (28): : 6506 - 6512
  • [44] SOFT-X-RAY PROJECTION IMAGING WITH MULTILAYER REFLECTION MASKS
    ITO, M
    OIZUMI, H
    SOGA, T
    YAMANASHI, H
    OGAWA, T
    KATAGIRI, S
    SEYA, E
    TAKEDA, E
    MICROELECTRONIC ENGINEERING, 1995, 27 (1-4) : 285 - 290
  • [45] SOFT-X-RAY REDUCTION LITHOGRAPHY USING MULTILAYER MIRRORS
    KINOSHITA, H
    KURIHARA, K
    TAKENAKA, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1991, 30 (11B): : 3048 - 3052
  • [46] SOFT-X-RAY REDUCTION LITHOGRAPHY USING MULTILAYER MIRRORS
    KINOSHITA, H
    KURIHARA, K
    ISHII, Y
    TORII, Y
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06): : 1648 - 1651
  • [47] PLATINUM CARBON MULTILAYER REFLECTORS FOR SOFT-X-RAY OPTICS
    LODHA, GS
    YAMASHITA, K
    SUZUKI, T
    HATSUKADE, I
    TAMURA, K
    ISHIGAMI, T
    TAKAHAMA, S
    NAMBA, Y
    APPLIED OPTICS, 1994, 33 (25): : 5869 - 5874
  • [48] SOFT-X-RAY PHASE MODULATION MULTILAYER DISPERSIVE ELEMENT
    YUAN, LX
    FAN, ZX
    CUL, MQ
    FU, SJ
    OPTICAL ENGINEERING, 1995, 34 (05) : 1508 - 1511
  • [49] Interdiffusion in CoN/CN soft-x-ray multilayer mirrors
    Bai, HL
    Jiang, EY
    Wang, CD
    THIN SOLID FILMS, 1997, 304 (1-2) : 278 - 285
  • [50] FABRICATION AND TEST OF SOFT-X-RAY MULTILAYER DIFFRACTION GRATINGS
    BERROUANE, H
    ANDRE, JM
    MALEK, CK
    FOUCHET, S
    LADAN, FR
    RIVOIRA, R
    BARCHEWITZ, R
    X-RAY/EUV OPTICS FOR ASTRONOMY AND MICROSCOPY, 1989, 1160 : 280 - 285
12345