LOW-RADIATION-DAMAGE MULTILAYER COATINGS FOR THE SOFT-X-RAY REGION

被引：3
|
作者：
HUNTER, WR [1 ]
SEELY, JF [1 ]
机构：
[1] USN, RES LAB, WASHINGTON, DC 20375 USA
来源：
APPLIED OPTICS | 1993年 / 32卷 / 25期
关键词：
D O I：
10.1364/AO.32.004846
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Highly reflecting multilayer coatings used to form resonant cavities for soft-x-ray lasers or for other high-intensity applications (free-electron lasers, x-ray projection lithography, etc.) can be destroyed by strong electric fields generated at the multilayer boundaries. Electric-field strengths can be reduced at the boundaries by altering slightly the layer thicknesses of the final or topmost layers. Calculations are presented showing reduced field strengths caused by altering final-layer thicknesses.
引用
下载
收藏
页码：4846 / 4851
页数：6
相关论文
共 50 条
  • [1] MULTILAYER GRATINGS FOR THE SOFT-X-RAY REGION
    ANDRE, JM
    SAMMAR, A
    MALEK, CK
    TROUSSEL, P
    BAC, S
    BARCHEWITZ, R
    PARDO, B
    BERROUANE, H
    MORENO, T
    LADAN, FR
    RIVOIRA, R
    SCHIRMANN, D
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (01): : 1399 - 1403
  • [2] CHARACTERIZATION OF MULTILAYER REFLECTORS FOR THE SOFT-X-RAY REGION USING SYNCHROTRON RADIATION
    SAKURAI, M
    FUJITA, J
    YAMASHITA, K
    OHTANI, M
    HATSUKADE, I
    TAMURA, K
    NAGATA, H
    SUZUKI, Y
    SEKI, S
    VACUUM, 1990, 41 (4-6) : 1234 - 1236
  • [3] MULTILAYER MIRROR FOR SOFT-X-RAY SYNCHROTRON RADIATION
    ISHII, Y
    TAKENAKA, H
    KINOSHITA, H
    KURIHARA, K
    NTT REVIEW, 1990, 2 (04): : 77 - 85
  • [4] MULTILAYER MIRRORS FOR SOFT-X-RAY AND VUV RADIATION
    GAPONOV, SV
    GARIN, FV
    GUSEV, SL
    KOCHEMASOV, AV
    PLATONOV, YY
    SALASHCHENKO, NN
    GLUSKIN, ES
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 208 (1-3): : 227 - 231
  • [5] PROGRESS IN EXTREME ULTRAVIOLET AND SOFT-X-RAY MULTILAYER COATINGS
    HAGENLOCHER, AK
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1981, 315 : 118 - 122
  • [6] STUDIES OF THE MULTILAYER MIRROR REFLECTIVITY IN SOFT-X-RAY REGION
    MIAO, JW
    CUI, MQ
    WANG, J
    TANG, ES
    ACTA PHYSICA SINICA-OVERSEAS EDITION, 1995, 4 (02): : 130 - 138
  • [7] MULTILAYER COATED LAMINAR GRATINGS IN THE SOFT-X-RAY REGION
    ISHIGURO, E
    KAWASHIMA, T
    YAMASHITA, K
    KUNIEDA, H
    YAMAZAKI, T
    SATO, K
    KOEDA, M
    NAGANO, T
    SANO, K
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (02): : 2112 - 2115
  • [8] FABRICATION AND TESTS OF MULTILAYER GRATINGS FOR THE SOFT-X-RAY REGION
    BAC, S
    TROUSSEL, P
    MALEK, CK
    BOHER, P
    GUERIN, P
    LADAN, FR
    HOUDY, P
    SCHIRMANN, D
    BARCHEWITZ, R
    JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE, 1993, 24 (02): : 88 - 96
  • [9] FOCUSING OF SYNCHROTRON RADIATION IN SOFT-X-RAY REGION
    AOKI, S
    KAWATA, S
    SAKAYANAGI, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (04) : 733 - 734
  • [10] PERFORMANCE OF ETCHED LAMINAR MULTILAYER GRATINGS IN THE SOFT-X-RAY REGION
    ANDRE, JM
    BAC, S
    BARCHEWITZ, R
    BERROUANE, H
    MORENO, T
    SAMMAR, A
    MALEK, CK
    LADAN, FR
    TROUSSEL, P
    SCHIRMANN, D
    PARDO, B
    RIVOIRA, R
    JOURNAL OF MODERN OPTICS, 1992, 39 (08) : 1681 - 1694
12345