DETERMINATION OF DOSES FOR ION-IMPLANTATION IN GARNET-FILMS

被引:16
|
作者
JOUVE, H [1 ]
GAILLIARD, JP [1 ]
PIAGUET, J [1 ]
机构
[1] CEN,LAB ELECTR & TECHNOL INFORMATIQUE,BP 85,38041 GRENOBLE,FRANCE
关键词
D O I
10.1109/TMAG.1975.1058956
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1082 / 1084
页数:3
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