A new surface analysis by soft X-ray excited by low energy electron beam

被引：1

作者：

Ueda, Kazuyuki ^{[1
]}

Yoshikawa, Yoshiko ^{[1
]}

机构：

[1] Toyota Technol Inst, Nano High Tech Res Ctr, Tempaku Ku, Hisaka 2 Chome, Nagoya, Aichi 4688511, Japan

来源：

E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY | 2006年 / 4卷

关键词：

surface analysis; soft X-ray; EDX; surface contaminations;

D O I：

10.1380/ejssnt.2006.443

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A novel spectroscopy, low energy electron excited soft X-ray spectroscopy (LEEXS) has been demonstrated in surface analysis of Si(100) crystal surfaces. The adoption of glancing angle as the incident angle as well as takeoff angle makes it possible to highly detect the X-ray signal from surface top layers. In addition to the surface sensitivity, the use of the low-energy primary electron (600 eV to 2.6 keV) enables a (nondestructive) detection of light elements on the surface with its high sensitivity that has ever been impossible for similar X-ray spectroscopy with high-energy primary electrons.

引用

页码：443 / 445

页数：3

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