ELECTRICAL-PROPERTIES OF ION-IMPLANTED P-N-JUNCTION DIODES IN BETA-SIC

被引：78
|
作者：
EDMOND, JA [1 ]
DAS, K [1 ]
DAVIS, RF [1 ]
机构：
[1] N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 03期
关键词：
D O I：
10.1063/1.340034
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：922 / 929
页数：8
相关论文
共 50 条
  • [1] ION-IMPLANTED P-N-JUNCTION INDIUM-PHOSPHIDE IMPATT DIODES
    BERENZ, JJ
    FANK, FB
    HIERL, TL
    [J]. ELECTRONICS LETTERS, 1978, 14 (21) : 683 - 684
  • [2] PLANAR, ION-IMPLANTED, HIGH-VOLTAGE 6H-SIC P-N-JUNCTION DIODES
    SHENOY, PM
    BALIGA, BJ
    [J]. IEEE ELECTRON DEVICE LETTERS, 1995, 16 (10) : 454 - 456
  • [3] SCANNING-ELECTRON-BEAM ANNEALING OF ION-IMPLANTED P-N-JUNCTION DIODES
    MCMAHON, RA
    AHMED, H
    SPEIGHT, JD
    DOBSON, RM
    [J]. ELECTRONICS LETTERS, 1979, 15 (14) : 433 - 435
  • [4] ELECTRICAL-PROPERTIES OF MULTI P-N-JUNCTION DEVICES
    KATZ, J
    MARGALIT, S
    YARIV, A
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (06) : 977 - 984
  • [5] P-N-JUNCTION FORMATION BY LASER ANNEALING OF ION-IMPLANTED SILICON
    LINDNER, M
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 57 (01): : 263 - 267
  • [6] ELECTRICAL-PROPERTIES OF ION-IMPLANTED POLYTHIOPHENE
    ISOTALO, H
    STUBB, H
    KUIVALAINEN, P
    [J]. SYNTHETIC METALS, 1989, 28 (1-2) : C305 - C310
  • [7] OPTICAL AND ELECTRICAL-PROPERTIES OF PYROLYTIC BETA-SIC
    AKIMCHENKO, IP
    IVANOVA, LM
    PLETYUSHKIN, AA
    RASULOVA, GK
    [J]. INORGANIC MATERIALS, 1978, 14 (04) : 523 - 525
  • [8] RESPONSIVITY OF ION-IMPLANTED P-N-JUNCTION IN A GAAS ELECTROABSORPTION AVALANCHE DETECTOR
    ZULEEG, R
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (06) : 799 - 801
  • [9] Electrical characterization of ion-implanted n+/p 6H-SiC diodes
    Poggi, A
    Nipoti, R
    Cardinali, GC
    Moscatelli, F
    [J]. SILICON CARBIDE AND RELATED MATERIALS - 2002, 2002, 433-4 : 621 - 624
  • [10] ELECTRICAL-PROPERTIES OF ION-IMPLANTED PCALF FILMS
    DANN, AJ
    FAHY, MR
    JEYNES, C
    WILLIS, MR
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1987, 101 (01): : K45 - K48
12345