VACUUM-SYSTEMS AND PROCESSES FROM THE VIEWPOINT OF SOFTWARE ENGINEERING

被引：0

作者：

HAGEMANS, KL

机构：

来源：

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D O I：

10.1016/0042-207X(88)90448-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：711 / 718

页数：8

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[2] VACUUM-SYSTEMS
不详
[J]. OPTICAL SPECTRA, 1979, 13 (01): : 46 - 46
[3] VACUUM-SYSTEMS
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[4] VACUUM-SYSTEMS
不详
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[5] VACUUM-SYSTEMS - OVERVIEW
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[J]. RESEARCH-DEVELOPMENT, 1973, 24 (09): : 68 - &
[6] VACUUM-SYSTEMS FOR MICROELECTRONICS
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 228 - 232
[7] VACUUM-SYSTEMS FOR VACUUM MICROBALANCES
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[J]. VACUUM, 1985, 35 (01) : 1 - 4
[8] VALVES FOR VACUUM-SYSTEMS
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[9] VACUUM-SYSTEMS FOR MICROELECTRONICS
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[10] THE LEP VACUUM-SYSTEMS
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